alpha300 Semiconductor Edition – Raman imaging microscope for large wafer inspection

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alpha300 Semiconductor Edition – Raman imaging microscope for large wafer inspection
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This product profile describes the features and applications of the alpha300 Semiconductor Edition Raman microscope for chemical imaging.

The alpha300 Semiconductor Edition is a sophisticated confocal Raman microscope designed for the chemical analysis of semiconducting materials. This advanced tool helps researchers quickly analyze crystal quality, strain, and doping levels in semiconductor samples and wafers.

All microscope components are fully automated, enabling remote-control and the implementation of standard measurement procedures.

Confocal Raman image of a 150 mm SiC wafer. TrueComponent Analysis identified two spectra, which mainly differed in the doping-sensitive A). The image reveals an oval region with a different doping concentration than the bulk wafer area . Image Credit: Oxford Instruments WITec

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